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Plasmaloses und Iaserinduziertes Ätzen von Silicium mit den Halogenen Fluor, Chlor und Brom.

By: Contributor(s): Material type: TextTextLanguage: de Language: de Language: en Publication details: Karlsruhe : FZKA, 1995.Description: 52 p. : ilISSN:
  • 0947-8620
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Holdings
Item type Home library Call number Status Barcode
Books Books Centro de Información Eduardo Savino FZKA-5574 (Browse shelf(Opens below)) Available 45918
Total holds: 0

Bibliografía: p.50-52

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