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Solidstate physics, fluidics, and analytical techniques in micro and nanotechnology

By: Material type: TextTextLanguage: en Publication details: Boca Raton; London; New York : CRC press Taylor and Francis Group, 2012.Description: 3 v. : il., tabla, diagrISBN:
  • 9781420055115
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Título de la 1.ed.: 'Fundamentals of microfabrication'

Título de la 2.ed.: 'Fundamentals of microfabrication : the science of miniaturization'

Ejercicios y bibliografía al final de cada capítulo

Ed. anterior: Fundamentals of microfabrication : the science of miniaturization. 2.ed.. Inventario: 50590

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