Fundamentals of microfabrication : the science of miniaturization.
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TextLanguage: en Publication details: Boca Raton, Fla. : CRC press, 2002.Description: 723 p. : il., tabla, diagrISBN: - 0849308267
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Centro de Información Eduardo Savino | 621.382.2 M266 2.ed. (Browse shelf(Opens below)) | Missing | 50590 |
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| 621.382.2 [021] D155 ej.2 Silicon rectifier handbook. | 621.382.2 [021] R275 2.ed. Handbook of silicon wafer cleaning technology. | 621.382.2 F114 Diodos reguladores de voltaje [Zener]. | 621.382.2 M266 2.ed. Fundamentals of microfabrication : the science of miniaturization. | 621.382.2 M266 3.ed. v.1 Solidstate physics, fluidics, and analytical techniques in micro and nanotechnology | 621.382.2 M266 3.ed. v.1 Solidstate physics, fluidics, and analytical techniques in micro and nanotechnology | 621.382.2 Sz21 3.ed. Physics of semiconductor devices. |
Apéndices: p.669-702
Ejercicios y bibliografía al final de cada capítulo
Ed. anterior: Fundamentals of microfabrication and nanotechnology. 3.ed.. Inventario: 50895
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