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Plasma properties, deposition and etching.
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TextLanguage: en Language: en Publication details: Aedermannsdorf : Trans Tech Publications, 1993.Description: x, 742 p. : ilISBN: - 087849670X
- 02555476
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Centro de Información Eduardo Savino | 533.9 P86 (Browse shelf(Opens below)) | Available | 47536 |
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| 533.9 M232 1984 Twenty years of plasma physics. | 533.9 M232 1984 Twenty years of plasma physics. | 533.9 P751 Topics in plasma diagnostics. | 533.9 P86 Plasma properties, deposition and etching. | 533.9 R325 REVIEWS of plasma physics. | 533.9 R325 REVIEWS of plasma physics. | 533.9 R325 REVIEWS of plasma physics. |
Bibliografía al final de cada trabajo
Publicación de la revista "Materials science forum" vol.140/142 de 1993
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