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Plasma properties, deposition and etching.

Pouch, J. J.

Plasma properties, deposition and etching. - Aedermannsdorf : Trans Tech Publications, 1993. - x, 742 p. : il.

Bibliografía al final de cada trabajo Publicación de la revista "Materials science forum" vol.140/142 de 1993

ISBN: 087849670X

ISSN: 02555476

Subjects--Topical Terms:
PLASMA, FISICA DEL

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