DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS.

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TextLanguage: de Publication details: Karlsruhe : Kernforschungszentrum Karlsruhe, 1993.Description: 94 pISSN:

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Item type	Home library	Call number	Status	Barcode
Books	Centro de Información Eduardo Savino	KfK 5262 (Browse shelf(Opens below))	Available	40656

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