DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS.

Kadel, K.

DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. - Karlsruhe : Kernforschungszentrum Karlsruhe, 1993. - 94 p.

ISSN: 0303-4003

Standard No.: KfK 5262

DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS.

APA

Kadel K., Stern G., Broßardt R., Schomburg W. & Kernforschungszentrum Karlsruhe. (1993). DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. Karlsruhe: Kernforschungszentrum Karlsruhe.

Chicago

Kadel K, Stern G, Broßardt R, Schomburg W and Kernforschungszentrum Karlsruhe. 1993. DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. Karlsruhe: Kernforschungszentrum Karlsruhe.

Harvard

Kadel K., Stern G., Broßardt R., Schomburg W. and Kernforschungszentrum Karlsruhe. (1993). DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. Karlsruhe: Kernforschungszentrum Karlsruhe.

MLA

Kadel K, Stern G, Broßardt R, Schomburg W and Kernforschungszentrum Karlsruhe. DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. Karlsruhe: Kernforschungszentrum Karlsruhe. 1993.

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