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Fundamentals of microfabrication : the science of miniaturization.

By: Material type: TextTextLanguage: en Publication details: Boca Raton, Fla. : CRC press, 2002.Description: 723 p. : il., tabla, diagrISBN:
  • 0849308267
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Holdings
Item type Home library Call number Status Barcode
Books Books Centro de Información Eduardo Savino 621.382.2 M266 2.ed. (Browse shelf(Opens below)) Missing 50590
Total holds: 0

Apéndices: p.669-702

Ejercicios y bibliografía al final de cada capítulo

Ed. anterior: Fundamentals of microfabrication and nanotechnology. 3.ed.. Inventario: 50895

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