| 000 | 00965cam a2200277 i 4500 | ||
|---|---|---|---|
| 999 |
_c32217 _d32217 |
||
| 001 | 4110121 | ||
| 003 | AR-SmCIES | ||
| 005 | 20190104130412.0 | ||
| 008 | 760810s1976 enka rb 001 0 eng d | ||
| 080 | _a539.188 | ||
| 100 | 1 |
_aTownsend, P. D. _q(Peter David) _91742 |
|
| 245 | 1 | 0 |
_aIon implantation, sputtering and their applications / _cby P. D. Townsend, J. C. Kelly, N. E. W. Hartley. |
| 260 |
_aLondon ; _aNew York : _bAcademic Press, _c1976. |
||
| 300 |
_aix, 333 p. : _bil. ; _c24 cm. |
||
| 504 | _aBibliografía al final de cada capítulo. | ||
| 650 | 7 |
_aION IMPLANTATION _2inist _91743 |
|
| 650 | 7 |
_aIMPLANTACION DE IONES _2inist _91744 |
|
| 650 | 7 |
_aCHISPORROTEO _2inist _91745 |
|
| 650 | 7 |
_aSPUTTERING _2inist _91746 |
|
| 700 | 1 |
_aKelly, J. C. _q(John Clive), _91747 |
|
| 700 | 1 |
_aHartley, N. E. W., _91748 |
|
| 942 |
_2udc _cBK |
||