| 000 | 00880nam a2200241 a 4500 | ||
|---|---|---|---|
| 008 | 170703s2008####xxuad||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 020 | _a9780815515548 | ||
| 041 | 7 |
_aen _2ISO 639-1 |
|
| 091 | _a50898 | ||
| 100 | 1 |
_aReinhardt, Karen A. _eed. |
|
| 245 | 1 | 0 | _aHandbook of silicon wafer cleaning technology. |
| 260 |
_aNorwich, N.Y. : _bW. Andrew, _c2008. |
||
| 300 |
_axxvi, 718 p. : _bil., tabla, diagr. |
||
| 490 | 1 | _aMaterials science and process technology series | |
| 500 | _aBibliografía al final de cada capítulo | ||
| 650 | 4 | _aSEMICONDUCTORES -DISPOSITIVOS -MANUALES | |
| 650 | 4 | _aTECNOLOGIA DE SILICIO -MANUALES | |
| 700 | 1 |
_aKern, Werner _d1925- _eed. |
|
| 830 | _aMaterials science and process technology series | ||
| 999 |
_c25860 _d25860 |
||