| 000 | 01379nam a2200313 a 4500 | ||
|---|---|---|---|
| 008 | 170703s2012####nyuad||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 020 | _a9781420055115 | ||
| 041 | 7 |
_aen _2ISO 639-1 |
|
| 091 | _a50895 | ||
| 092 | _av.1 [xiii, 641 p.] | ||
| 100 | 1 | _aMadou, Marc J. | |
| 245 | 1 | 0 | _aSolidstate physics, fluidics, and analytical techniques in micro and nanotechnology |
| 773 | 1 | _aFundamentals of microfabrication and nanotechnology | |
| 260 |
_aBoca Raton; London; New York : _bCRC press Taylor and Francis Group, _c2012. |
||
| 300 |
_a3 v. : _bil., tabla, diagr. |
||
| 500 | _aTítulo de la 1.ed.: 'Fundamentals of microfabrication' | ||
| 500 | _aTítulo de la 2.ed.: 'Fundamentals of microfabrication : the science of miniaturization' | ||
| 500 | _aEjercicios y bibliografía al final de cada capítulo | ||
| 580 | _aEd. anterior: Fundamentals of microfabrication : the science of miniaturization. 2.ed.. Inventario: 50590 | ||
| 650 | 4 | _aSEMICONDUCTORES -DISPOSITIVOS | |
| 650 | 4 | _aMICROELECTROMECANICA | |
| 650 | 4 | _aMICROELECTRONICA | |
| 650 | 4 | _aMICROFABRICACION | |
| 650 | 4 | _aNANOTECNOLOGIA | |
| 999 |
_c25858 _d25858 |
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