000 00899nam a2200277 a 4500
008 170703s1994#### ukad||f#|||||00| 0#eng#d
003 AR-SmCIES
020 _a0521394309
041 7 _aen
_2ISO 639-1
091 _a49929
100 1 _aTownsend, Peter David
245 1 0 _aOptical effects of ion implantation.
260 _aCambridge :
_bCambridge University press,
_c1994.
300 _axiv, 280 p. :
_btabla, diagr.
490 1 _aCambridge studies in modern optics, v.<31>
500 _aBibliografĂ­a al final de cada capĂ­tulo
650 4 _aOPTICA IONICA
650 4 _aIMPLANTACION DE IONES
650 4 _aMATERIALES -PROPIEDADES OPTICAS
650 4 _aMICROELECTRONICA
700 1 _aChandler, P. J.
700 1 _aZhang, L.
830 _aCambridge studies in modern optics, v.<31>
999 _c25031
_d25031