000 00846nam a2200265 a 4500
008 170703s1973####xxua|||f#|||||00| 0#eng#d
003 AR-SmCIES
020 _a0882758993
041 7 _aen
_2ISO 639-1
091 _a49336
100 1 _aWilson, Robert G.
245 1 0 _aIon beams : with applications to ion implantation.
260 _aHuntington, N.Y. :
_bR. Krieger,
_c1973.
300 _axxi, 500 p. :
_bil., tabla
500 _aReprint edition 1979 with corrections
500 _aTablas 2, adjuntas a contratapa
500 _aBibliografĂ­a al final de cada capĂ­tulo
650 4 _aOPTICA IONICA
650 4 _aIMPLANTACION DE IONES
650 4 _aSEMICONDUCTORES
650 4 _aMICROELECTRONICA
700 1 _aBrewer, George Raymond
999 _c24442
_d24442