| 000 | 00833nam a2200241 a 4500 | ||
|---|---|---|---|
| 008 | 170703s1994####nyud|||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 020 | _a0471005770 | ||
| 041 | 7 |
_aen _2ISO 639-1 |
|
| 091 | _a31 4 5 207 ITJS | ||
| 100 | 1 | _aLieberman, Michael A. | |
| 245 | 1 | 0 | _aPrinciples of plasma discharges and materials processing. |
| 260 |
_aNew York : _bJohn Wiley, _c1994. |
||
| 300 |
_axxvi, 572 p. : _bdiagr. |
||
| 500 | _aApĂ©ndices y bibliografĂa: p.541-564 | ||
| 650 | 4 | _aPLASMA, FISICA DEL | |
| 650 | 4 | _aPELICULAS DELGADAS [FISICA] | |
| 650 | 4 | _aESTADO SOLIDO DEFECTOS | |
| 700 | 1 | _aLichtenberg, Allan J. | |
| 999 |
_c23279 _d23279 |
||