| 000 | 00866nam a2200229 a 4500 | ||
|---|---|---|---|
| 008 | 170703s1988####xxua|||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 020 | _a0815511531 | ||
| 041 | 7 |
_aen _2ISO 639-1 |
|
| 091 | _a31 4 5 163 ITJS | ||
| 100 | 1 |
_aSchuegraf, Klaus K. _eed. |
|
| 245 | 1 | 0 | _aHandbook of thinfilm deposition processes and techniques: principles, methods, equipment and applications. |
| 260 |
_aWestwood, N.J. : _bNoyes publ., _c1988. |
||
| 300 |
_axvii, 413 p. : _bil. |
||
| 490 | 1 | _aMaterials science and process technology series | |
| 500 | _aBibliografía al final de cada capítulo | ||
| 650 | 4 | _aPELICULAS DELGADAS [FISICA] | |
| 650 | 4 | _aMICROSCOPIA ELECTRONICA | |
| 830 | _aMaterials science and process technology series | ||
| 999 |
_c23267 _d23267 |
||