000 00416nam a2200145 a 4500
008 170703s1980####nyu||||f#|||||00| 0#uuu#d
003 AR-SmCIES
091 _a46694
100 1 _aO'Hanlon, J.F.
245 1 0 _aA user's guide to vacuum technology.
260 _aNew York, N.Y. :
_bJ. Wiley,
_c1980.
300 _a402 p.
999 _c22759
_d22759