000 | 00470nam a2200169 a 4500 | ||
---|---|---|---|
008 | 170703t1965####nyu||||f#|||||00| 0#eng#d | ||
003 | AR-SmCIES | ||
041 | 7 |
_aen _2ISO 639-1 |
|
080 | _a533.5 | ||
091 | _a13853 | ||
100 | 1 | _aLewin, Gerhard | |
245 | 1 | 0 | _aFundamentals of vacuum science and technology. |
260 |
_aNew York : _bMcGraw-Hill, _cc1965. |
||
300 | _a248 p. | ||
999 |
_c22145 _d22145 |