000 00470nam a2200169 a 4500
008 170703t1965####nyu||||f#|||||00| 0#eng#d
003 AR-SmCIES
041 7 _aen
_2ISO 639-1
080 _a533.5
091 _a13853
100 1 _aLewin, Gerhard
245 1 0 _aFundamentals of vacuum science and technology.
260 _aNew York :
_bMcGraw-Hill,
_cc1965.
300 _a248 p.
999 _c22145
_d22145