| 000 | 01003nam a2200253 a 4500 | ||
|---|---|---|---|
| 008 | 170703s1989####xxuad||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 041 | 7 |
_aen _2ISO 639-1 |
|
| 091 | _a1972 PMTM | ||
| 100 | 1 |
_aCuomo, Jerome J. _eed. |
|
| 245 | 1 | 0 | _aHandbook of ion beam processing technology : principles, deposition, film modification and synthesis. |
| 260 |
_aPark Ridge, N.J. : _bNoyes publ., _c1989. |
||
| 300 |
_axviii, 438 p. : _bil., tabla, diagr. |
||
| 490 | 1 | _aMaterials science and process technology series | |
| 500 | _aBibliografía al final de cada capítulo | ||
| 650 | 4 | _aOPTICA IONICA -MANUALES | |
| 650 | 4 | _aBOMBARDEO DE IONES -APLICACIONES [INDUSTRIA] -MANUALES | |
| 650 | 4 | _aIMPLANTACION DE IONES -MANUALES | |
| 700 | 1 |
_aRossnagel, Stephen M. _eed. |
|
| 700 | 1 |
_aKaufman, Harold R. _eed. |
|
| 830 | _aMaterials science and process technology series | ||
| 999 |
_c22114 _d22114 |
||