000 00473nam a2200145 a 4500
008 170703s1970#### ||||f#|||||10| 0#uuu#d
003 AR-SmCIES
091 _a621 PMM
111 2 _aSymposium on scanning electron microscope
_n3
_cChicago,US
_d1970
245 1 0 _aProceedings....
260 _a[s.l.] :
_bIIT Research institute
_c1970.
300 _a534 p.
999 _c22003
_d22003