| 000 | 00881nam a2200205 a 4500 | ||
|---|---|---|---|
| 008 | 170703s1992#### ||||f#|||||10| 0#uuu#d | ||
| 003 | AR-SmCIES | ||
| 091 | _a1927 PMTM | ||
| 100 | 1 |
_aNemanich, R. J. et al _eeds. |
|
| 245 | 1 | 0 | _aChemical surface preparation, passivation and cleaning for semiconductor growth and processing. |
| 260 |
_aPittsburgh : _bMaterials research society, _c1992. |
||
| 300 | _a529 p. | ||
| 490 | 1 | _a/Materials research society symposium proceedings -- v.259/ | |
| 650 | 7 |
_aSEMICONDUCTORS _2INIS |
|
| 650 | 7 |
_aCRYSTAL GROWTH _2INIS |
|
| 711 | 2 |
_aSymposium on chemical surface preparation, passivation and cleaning for semiconductor growth and processing _cSan Francisco,US _d1992 |
|
| 830 | _a/Materials research society symposium proceedings -- v.259/ | ||
| 999 |
_c21346 _d21346 |
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