| 000 | 00440nam a2200145 a 4500 | ||
|---|---|---|---|
| 008 | 170703s1992####ne ||||f#|||||00| 0#uuu#d | ||
| 003 | AR-SmCIES | ||
| 091 | _a1864 PMTM | ||
| 100 | 1 |
_aZiegler, J. F. _eed. |
|
| 245 | 1 | 0 | _aHandbook of ion implantation technology. |
| 260 |
_aAmsterdam : _bElsevier Science Publishers, _c1992. |
||
| 300 | _a700 p. | ||
| 999 |
_c21166 _d21166 |
||