000 00600nam a2200169 a 4500
008 170703s1976#### ||||f#|||||10| 0#uuu#d
003 AR-SmCIES
091 _a627 PMM
092 _av.1
111 2 _aSymposium on scanning electron microscope
_n9
_cChicago,US
_d1976
245 1 0 _aProceedings....
260 _aChicago :
_bIIT Research Institute,
_c1976.
300 _a2 v.
999 _c20493
_d20493