| 000 | 00773nam a2200241 a 4500 | ||
|---|---|---|---|
| 008 | 170703s1993####sz a|||f#|||||00| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 020 | _a087849670X | ||
| 022 | _a02555476 | ||
| 041 | 7 |
_aen _2ISO 639-1 |
|
| 041 | 7 |
_aen _2ISO 639-1 |
|
| 091 | _a47536 | ||
| 100 | 1 |
_aPouch, J. J. _eed. |
|
| 245 | 1 | 0 | _aPlasma properties, deposition and etching. |
| 260 |
_aAedermannsdorf : _bTrans Tech Publications, _c1993. |
||
| 300 |
_ax, 742 p. : _bil. |
||
| 500 | _aBibliografía al final de cada trabajo | ||
| 500 | _aPublicación de la revista "Materials science forum" vol.140/142 de 1993 | ||
| 650 | 4 | _aPLASMA, FISICA DEL | |
| 700 | 1 |
_aAlterovitz, S. A. _eed. |
|
| 999 |
_c19012 _d19012 |
||