| 000 | 00706nam a2200229 a 4500 | ||
|---|---|---|---|
| 008 | 170703s1993####gw ||||f#|||||00| 0#ger#d | ||
| 003 | AR-SmCIES | ||
| 022 | _a0303-4003 | ||
| 024 | 8 | _aKfK 5262 | |
| 041 | 7 |
_ade _2ISO 639-1 |
|
| 091 | _a40656 | ||
| 100 | 1 | _aKadel, K. | |
| 710 | 2 | _aKernforschungszentrum Karlsruhe | |
| 245 | 1 | 0 | _aDEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. |
| 260 |
_aKarlsruhe : _bKernforschungszentrum Karlsruhe, _c1993. |
||
| 300 | _a94 p. | ||
| 700 | 1 | _aStern, G. | |
| 700 | 1 | _aBroßardt, R. | |
| 700 | 1 | _aSchomburg, W. | |
| 999 |
_c17478 _d17478 |
||