000 00661nam a2200217 a 4500
008 170703s1993####gw ||||f#|||||00| 0#ger#d
003 AR-SmCIES
022 _a0303-4003
024 8 _aKfK 5251
041 7 _ade
_2ISO 639-1
091 _a40628
100 1 _aRapp, R.
710 2 _aKERNFORSCHUNGSZENTRUM KARLSRUHE
245 1 0 _aCONCEPTUAL DESIGN, DEVELOPMENT AND MANUFACTURE OF A MICROMEMBRANE PUMP BY THE LIGA TECHNIQUE..
260 _aKarlsruhe :
_bKERNFORSCHUNGSZETRUM KARLSRUHE,
_c1993.
300 _a97 p.
700 1 _aSchomburg, W. K.
700 1 _aBley, P.
999 _c17452
_d17452