000 00446nam a2200145 a 4500
008 170703s1993####gw ||||f#|||||00| 0#ger#d
003 AR-SmCIES
024 8 _aKfK 5171
041 7 _ade
_2ISO 639-1
091 _a38622
245 1 0 _aTechnique of application of mechanical microstructures onto microelectronic circuits.
260 _a[s.l.] :
_b[s.n.],
_c1993.
999 _c17129
_d17129