| 000 | 00438nam a2200145 a 4500 | ||
|---|---|---|---|
| 008 | 170703s1993####gw ||||f#|||||00| 0#ger#d | ||
| 003 | AR-SmCIES | ||
| 024 | 8 | _aKfK 5153 | |
| 041 | 7 |
_ade _2ISO 639-1 |
|
| 091 | _a38443 | ||
| 245 | 1 | 0 | _aFundamentals and potential applications of the LIGA technique in microoptics. |
| 260 |
_a[s.l.] : _b[s.n.], _c1993. |
||
| 999 |
_c17062 _d17062 |
||