| 000 | 00419nam a2200133 a 4500 | ||
|---|---|---|---|
| 008 | 170703s1992####gw ||||f#|||||00| 0#uuu#d | ||
| 003 | AR-SmCIES | ||
| 024 | 8 | _aKFK 5088 | |
| 091 | _a37833 | ||
| 245 | 1 | 0 | _aDevelopment, optimization and test of electrostatic micromotors made by the LIGA process. |
| 260 |
_a[s.l.] : _b[s.n.], _c1992. |
||
| 999 |
_c16747 _d16747 |
||