| 000 | 01092nam a2200265 a 4500 | ||
|---|---|---|---|
| 008 | 170703t1984####xxua|||f#|||||10| 0#eng#d | ||
| 003 | AR-SmCIES | ||
| 020 | _a0931288304 | ||
| 041 | 7 |
_aen _2ISO 639-1 |
|
| 080 | _a539.2:539.12.04"1982" | ||
| 080 | _a537.533.35 | ||
| 091 | _a34309 | ||
| 100 | 1 |
_aKyser, David F. _eed. |
|
| 245 | 1 | 0 | _aElectron beam interactions with solids for microscopy, microanalysis and microlithography. |
| 260 |
_aAMF O'Hare, Il. : _bScanning electron microscopy, _cc1984. |
||
| 300 |
_a372 p. : _bil. ; 28,5 cm. |
||
| 500 | _aHeld at the Asilomar conference center | ||
| 500 | _aBibliografía al final de cada artículo | ||
| 650 | 4 | _aRADIACIONES -EFECTOS EN SOLIDOS -CONGRESOS | |
| 650 | 4 | _aMICROSCOPIA ELECTRONICA | |
| 711 | 2 |
_aConference on electron beam interactions with solids for microscopy, microanalysis and microlithography _n1. _cMonterey, Calif,US _d1982 |
|
| 711 | 2 |
_aPfefferkorn conference _n1. _cMonterey, Calif,US _d1982 |
|
| 999 |
_c15022 _d15022 |
||