000 01001nas a2200229 a 4500
008 170703cSeri####nyub||p#r||||#00|#||eng#d
003 AR-SmCIES
022 _a0734-211X
222 0 _aJournal of vacuum science and technology B
245 0 0 _aJournal of vacuum science and technology B
247 1 1 _aJournal of vacuum science and technology
260 _aNew York, N.Y. :
_bAmerican Vacuum SocietyAmerican Institute of Physics,
310 _aBimestral
590 _aContratación directa con SWETS para 1993
653 _aFISICA
780 0 0 _aJournal of vacuum science and technology
999 _c13665
_d13665