| 000 | 01525nas a2200301 a 4500 | ||
|---|---|---|---|
| 008 | 170703cSeri####nyub||p#r||||#00|#||eng#d | ||
| 003 | AR-SmCIES | ||
| 022 | _a0734-2101 | ||
| 210 | 0 | _aJ. Vac. Sci. Technol. A | |
| 222 | 0 | _aJournal of vacuum science and technology A | |
| 245 | 0 | 0 | _aJournal of vacuum science and technology A |
| 247 | 1 | 1 | _aJournal of vacuum science and technology |
| 260 |
_aNew York, N.Y. : _bAmerican Vacuum SocietyAmerican Institute of Physics, |
||
| 310 | _aBimestral | ||
| 590 | _aContratación directa con SWETS para 1993 | ||
| 653 | _aFISICA | ||
| 780 | 0 | 0 | _aJournal of vacuum science and technology |
| 999 |
_c13640 _d13640 |
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