| 000 | 00829nas a2200217 a 4500 | ||
|---|---|---|---|
| 008 | 170703d19731982nyuux|p#r||||#00|#||eng#d | ||
| 003 | AR-SmCIES | ||
| 022 | _a0022-5355 | ||
| 210 | 0 | _aJ. VAC. SCI. TECHNOL. | |
| 222 | 0 | _aJournal of vacuum science and technology | |
| 245 | 0 | 0 | _aJournal of vacuum science and technology |
| 260 |
_aNew York, N.Y. : _bAMERICAN INSTITUTE OF PHYSICS, |
||
| 310 | _aIrregular | ||
| 653 | _aFISICA | ||
| 785 | 1 | 6 | _aJournal of vacuum science and technology A |
| 785 | 1 | 6 | _aJournal of vacuum science and technology B |
| 999 |
_c12456 _d12456 |
||