TY - SER ED - Société française du vide. TI - Le Vide, les couches minces SN - 0223-4335 U1 - 539.23 Se52 1978 ej.2 CY - Paris PB - Société française du vide. KW - PELICULAS DELGADAS KW - PERIODICOS KW - PULVERIZACION N1 - "Edited in French and English and devoted to surface and interface physics and chemistry."; Chemical abstracts; 0009-2258 ER -