TY - BOOK AU - Beck,Friedrich TI - Integrated circuit failure analysis: a guide to preparation techniques SN - 0471974013 U1 - 621.3815 21 PY - 1998/// CY - Chichester, New York PB - Wiley KW - Circuitos integrados KW - SEMICONDUCTORES KW - Fallos KW - Ensayos KW - Electronica KW - Confiabilidad N1 - Incluye bibliografía e índice analítico; Purpose and importance of preparatory semiconductor analysis -- Opening the package. Chip insulation -- Wet chemical etching procedures for removing layers of the chip structure -- Crystallographic etching in the silicon -- Dry etching the plasma -- Microsectioning technology, metallography -- Appendix 1: advice on health and safety at work -- Appendix 2: list of manufacturers and suppliers ER -