Integrated circuit failure analysis : a guide to preparation techniques /
Friedrich Beck ; translated by Stephen S. Wilson.
- Chichester ; New York : Wiley, c1998.
- xiv, 173 p. : il. ; 24 cm.
- Wiley series in quality and reliability engineering .
Incluye bibliografía e índice analítico.
Purpose and importance of preparatory semiconductor analysis -- Opening the package. Chip insulation -- Wet chemical etching procedures for removing layers of the chip structure -- Crystallographic etching in the silicon -- Dry etching the plasma -- Microsectioning technology, metallography -- Appendix 1: advice on health and safety at work -- Appendix 2: list of manufacturers and suppliers