TY  - BOOK
AU  - Schuegraf,Klaus K.
TI  - Handbook of thinfilm deposition processes and techniques: principles, methods, equipment and applications
T2  - Materials science and process technology series
SN  - 0815511531
PY  - 1988///
CY  - Westwood, N.J.
PB  - Noyes publ.
KW  - PELICULAS DELGADAS [FISICA]
KW  - MICROSCOPIA ELECTRONICA
N1  - Bibliografía al final de cada capítulo
ER  -