Schuegraf, Klaus K. <br/><br/>
Handbook of thinfilm deposition processes and techniques: principles, methods, equipment and applications. 

 - Westwood, N.J. :  Noyes publ.,  1988. 
 - xvii, 413 p. :  il. 
 - Materials science and process technology series .
 - Materials science and process technology series .
<br/><br/> Bibliografía al final de cada capítulo 
<br/><br/><label>ISBN: </label>0815511531 
<br/><br/><label>Subjects--Topical Terms: </label><br/>PELICULAS DELGADAS [FISICA]<br/>MICROSCOPIA ELECTRONICA