TY  - BOOK
AU  - Vollmer,J.
AU  - Hein,H.
ED  - Kernforschungszentrum Karlsruhe
TI  - Microminiature fluidic beam elements in LIGA-technique with integrated electrical control
SN  - 0303-4003
PY  - 1994///
CY  - Karlsruhe
PB  - Kfk
ER  -