TY  - BOOK
AU  - Kadel,K.
AU  - Stern,G.
AU  - Broßardt,R.
AU  - Schomburg,W.
ED  - Kernforschungszentrum Karlsruhe
TI  - DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS
SN  - 0303-4003
PY  - 1993///
CY  - Karlsruhe
PB  - Kernforschungszentrum Karlsruhe
ER  -