DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. - Kadel, K.; Kernforschungszentrum Karlsruhe; Stern, G.; Broßardt, R.; Schomburg, W. (Karlsruhe : Kernforschungszentrum Karlsruhe, 1993)