Kadel, K. <br/><br/>
DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS. 

 - Karlsruhe :  Kernforschungszentrum Karlsruhe,  1993. 
 - 94 p. 
<br/><br/><label>ISSN: </label>0303-4003 
<br/><br/><label>Standard No.: </label>KfK 5262