TY - BOOK AU - Rapp,R. AU - Schomburg,W.K. AU - Bley,P. ED - KERNFORSCHUNGSZENTRUM KARLSRUHE TI - CONCEPTUAL DESIGN, DEVELOPMENT AND MANUFACTURE OF A MICROMEMBRANE PUMP BY THE LIGA TECHNIQUE. SN - 0303-4003 PY - 1993/// CY - Karlsruhe PB - KERNFORSCHUNGSZETRUM KARLSRUHE ER -