Rapp, R. <br/><br/>
CONCEPTUAL DESIGN, DEVELOPMENT AND MANUFACTURE OF A MICROMEMBRANE PUMP BY THE LIGA TECHNIQUE.. 

 - Karlsruhe :  KERNFORSCHUNGSZETRUM KARLSRUHE,  1993. 
 - 97 p. 
<br/><br/><label>ISSN: </label>0303-4003 
<br/><br/><label>Standard No.: </label>KfK 5251