TY - BOOK AU - Kyser,David F. ED - Conference on electron beam interactions with solids for microscopy, microanalysis and microlithography ED - Pfefferkorn conference TI - Electron beam interactions with solids for microscopy, microanalysis and microlithography SN - 0931288304 PY - 1984/// CY - AMF O'Hare, Il. PB - Scanning electron microscopy KW - RADIACIONES -EFECTOS EN SOLIDOS -CONGRESOS KW - MICROSCOPIA ELECTRONICA N1 - Held at the Asilomar conference center; Bibliografía al final de cada artículo ER -