Journal of vacuum science and technology A 

 - New York, N.Y. :  American Vacuum SocietyAmerican Institute of Physics, 
 - Bimestral 
<br/><br/><label>ISSN: </label>0734-2101 
 = Journal of vacuum science and technology A 
 = J. Vac. Sci. Technol. A 
<br/><br/><label>Subjects--Index Terms: </label>FISICA