Journal of vacuum science and technology 

 - New York, N.Y. :  AMERICAN INSTITUTE OF PHYSICS, 
 - Irregular 
<br/><br/><label>ISSN: </label>0022-5355 
 = Journal of vacuum science and technology 
 = J. VAC. SCI. TECHNOL. 
<br/><br/><label>Subjects--Index Terms: </label>FISICA