Ion implantation, sputtering and their applications /
Townsend, P. D.
Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. - London ; New York : Academic Press, 1976. - ix, 333 p. : il. ; 24 cm.
Bibliografía al final de cada capítulo.
ION IMPLANTATION
IMPLANTACION DE IONES
CHISPORROTEO
SPUTTERING
539.188
Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. - London ; New York : Academic Press, 1976. - ix, 333 p. : il. ; 24 cm.
Bibliografía al final de cada capítulo.
ION IMPLANTATION
IMPLANTACION DE IONES
CHISPORROTEO
SPUTTERING
539.188