Handbook of silicon wafer cleaning technology.
Handbook of silicon wafer cleaning technology. - Norwich, N.Y. : W. Andrew, 2008. - xxvi, 718 p. : il., tabla, diagr. - Materials science and process technology series . - Materials science and process technology series .
Bibliografía al final de cada capítulo
9780815515548
SEMICONDUCTORES -DISPOSITIVOS -MANUALES
TECNOLOGIA DE SILICIO -MANUALES