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Ion beams : with applications to ion implantation.

Wilson, Robert G.

Ion beams : with applications to ion implantation. - Huntington, N.Y. : R. Krieger, 1973. - xxi, 500 p. : il., tabla

Reprint edition 1979 with corrections Tablas 2, adjuntas a contratapa Bibliografía al final de cada capítulo

ISBN: 0882758993

Subjects--Topical Terms:
OPTICA IONICA
IMPLANTACION DE IONES
SEMICONDUCTORES
MICROELECTRONICA

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