Handbook of thinfilm deposition processes and techniques: principles, methods, equipment and applications.
Schuegraf, Klaus K.
Handbook of thinfilm deposition processes and techniques: principles, methods, equipment and applications. - Westwood, N.J. : Noyes publ., 1988. - xvii, 413 p. : il. - Materials science and process technology series . - Materials science and process technology series .
Bibliografía al final de cada capítulo
0815511531
PELICULAS DELGADAS [FISICA]
MICROSCOPIA ELECTRONICA
Handbook of thinfilm deposition processes and techniques: principles, methods, equipment and applications. - Westwood, N.J. : Noyes publ., 1988. - xvii, 413 p. : il. - Materials science and process technology series . - Materials science and process technology series .
Bibliografía al final de cada capítulo
0815511531
PELICULAS DELGADAS [FISICA]
MICROSCOPIA ELECTRONICA
